Quality and parameter control of X-ray absorption gratings by angular X-ray transmission

Nikolai Gustschin, Alex Gustschin, Pascal Meyer, Manuel Viermetz, Philipp Riederer, Julia Herzen, Jürgen Mohr, Franz Pfeiffer

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


Here we report on a non-destructive, spatially resolving and easy to implement quality and parameter control method for high aspect ratio X-ray absorption gratings. Based on angular X-ray transmission measurements, our proposed technique allows to determine the duty cycle, the transmittance, the height, as well as the local inclination of the absorbing grating structures. A key advantage of the presented method is a fast and extensive grating quality evaluation without the need of implementing an entire grating interferometer. In addition to the local and surface-based analysis using a scanning electron microscope, our non-destructive method provides global averaged macroscopic and spatially resolved grating structure information without the requirement of resolving individual grating lines.

Original languageEnglish
Pages (from-to)15943-15955
Number of pages13
JournalOptics Express
Issue number11
StatePublished - 2019


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