Pull-in curves determined with monolithic FEM models

Stephan D.A. Hannot, Daniel J. Rixen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper gives an overview of the different monolithic approaches to compute the pull-in curve for discretized models of electrostatically actuated microsystems that are currently available in the literature. A method to implement monolithic charge loading combined with path-following is proposed. The performance of the algorithms is tested with some numerical experiments: FEM models of microbeams, used to model micro-switches. The resultsshow that the charge loading scheme provides a fast converging alternative to the traditional path-following approaches. Finally it is shown that the algorithm can be easily extended to handle bifurcations.

Original languageEnglish
Title of host publication2009 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2009
DOIs
StatePublished - 2009
Externally publishedYes
Event2009 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2009 - Delft, Netherlands
Duration: 26 Apr 200929 Apr 2009

Publication series

Name2009 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2009

Conference

Conference2009 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2009
Country/TerritoryNetherlands
CityDelft
Period26/04/0929/04/09

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