Pseudomorphic growth of SixGe1-x on GaAs(110)

K. Eberl, G. Krotz, T. Wolf, F. Schaffler, G. Abstreiter

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

SixGe1-x films were grown on cleaved GaAs(110) surfaces by molecular beam epitaxy at growth temperatures between 20 and 500 degrees C. The lattice mismatch between substrate and overlayer can be varied continuously between 0 and 4% by changing the SixGe1-x composition from x=0 (pure Ge) to x=1 (pure Si). The lateral lattice constant of the overlayer was determined as a function of coverage by quantitative analysis of the respective LEED pattern. This gives the critical thickness hc up to which the overlayer is elastically accommodated to the substrate. The segregation of Ga and As on top of the SixGe1-x layers is studied as a function of growth temperature and composition with Auger electron spectroscopy.

Original languageEnglish
Article number001
Pages (from-to)561-567
Number of pages7
JournalSemiconductor Science and Technology
Volume2
Issue number9
DOIs
StatePublished - 1987

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