Propagation of leaky surface acoustic waves under thin periodic metal electrodes

H. Meier, B. Schneiderbauer, P. Russer

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

We have investigated leaky surface acoustic waves (LSAW) propagating under thin periodic metal gratings on anisotropic and piezoelectric substrates. The inherent physical behavior of LSAW, consisting of coupled modes including terms decaying into the substrate and a term representing a radiating bulk wave, under thin metal strips is explained. A field theoretical analysis, that fits both the mechanical and electrical periodic boundary conditions, has been developed. Four types of electrically connected metal strips are discussed. The dispersion relation for LSAW is computed for different normalized metal strip thicknesses. Additionally, the frequency dependence of the LSAW attenuation constant is analyzed, and the bulk wave scattering is studied. It is found that both, the mechanical surface perturbation and the type of electrical connection between metal strips, can strongly influence LSAW propagation behavior. Numerical results are given for aluminum electrodes on 36 YX LiTaO3 substrate.

Original languageEnglish
Title of host publication1992 Ultrasonics Symposium Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages441-444
Number of pages4
ISBN (Electronic)0780305620
DOIs
StatePublished - 1992
Event1992 Ultrasonics Symposium - Tucson, United States
Duration: 20 Oct 199223 Oct 1992

Publication series

NameProceedings - IEEE Ultrasonics Symposium
Volume1992-October
ISSN (Print)1051-0117

Conference

Conference1992 Ultrasonics Symposium
Country/TerritoryUnited States
CityTucson
Period20/10/9223/10/92

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