TY - JOUR
T1 - Propagation characteristics of leaky surface acoustic waves for two thin metal layers on LiTaO3 substrate
AU - Meier, H.
AU - Russer, P.
N1 - Publisher Copyright:
© 1991 IEEE.
PY - 1991
Y1 - 1991
N2 - We have investigated leaky surface acoustic waves (LSAW) propagating in the crystalline X-direction of rotated Y-cuts of LiTaO3 substrates. The effect of two thin isotropic metallic films deposited on the substrate surface is rigorously taken into consideration. The relatively small bulk wave term in the partial wave solution has a phase velocity vector tilted towards the substrate at an angle of φ = 28.5° referred to the substrate surface for 36 ° YX LiTaO3. The radiating bulk wave is a slow shear wave (SSW). Taking energy flow characteristics into account, the power flow for greater penetration depths is that of the SSW. Phase velocity and attenuation constant are computed for different metallic film thicknesses and thickness ratios between the two films. The measured results compare favorably with those obtained from the theoretical analysis.
AB - We have investigated leaky surface acoustic waves (LSAW) propagating in the crystalline X-direction of rotated Y-cuts of LiTaO3 substrates. The effect of two thin isotropic metallic films deposited on the substrate surface is rigorously taken into consideration. The relatively small bulk wave term in the partial wave solution has a phase velocity vector tilted towards the substrate at an angle of φ = 28.5° referred to the substrate surface for 36 ° YX LiTaO3. The radiating bulk wave is a slow shear wave (SSW). Taking energy flow characteristics into account, the power flow for greater penetration depths is that of the SSW. Phase velocity and attenuation constant are computed for different metallic film thicknesses and thickness ratios between the two films. The measured results compare favorably with those obtained from the theoretical analysis.
UR - http://www.scopus.com/inward/record.url?scp=85066995534&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.1991.234186
DO - 10.1109/ULTSYM.1991.234186
M3 - Conference article
AN - SCOPUS:85066995534
SN - 1051-0117
SP - 359
EP - 362
JO - Proceedings - IEEE Ultrasonics Symposium
JF - Proceedings - IEEE Ultrasonics Symposium
M1 - 234186
T2 - 1991 IEEE Ultrasonics Symposium. ULTSYM 1991
Y2 - 8 December 1991 through 11 December 1991
ER -