TY - JOUR
T1 - Problem-oriented modeling of microtransducers
T2 - State of the art and future challenges
AU - Wachutka, Gerhard
PY - 1994/4/1
Y1 - 1994/4/1
N2 - The development and production of well-performing and inexpensive microsensors, actuators or complete microsystems are largely determined by intricate trade-off considerations. Optimum performance requires a judicious design based on a detailed understanding of the physical phenomena which govern the operation of single system components as well as their cooperation. To this purpose, modeling and numerical simulation are regarded as increasingly useful or even as indispensable. Problem-oriented modeling does not only reduce the number of costly and time-consuming experimental trial-and-error steps, but it also lends unique insight into the interior of a miniaturized device showing the distributions of various physical quantities which are not readily accessible to experiments. Future work has mostly to concentrate on a user-friendly modular 'CAD tool box' based on the concepts of 'tailored modeling'. This implies not only modern flexible software techniques and highly efficient computational methods, but in particular new methodologies for fast and reliable model validation and the availability of a process-oriented material-property data base.
AB - The development and production of well-performing and inexpensive microsensors, actuators or complete microsystems are largely determined by intricate trade-off considerations. Optimum performance requires a judicious design based on a detailed understanding of the physical phenomena which govern the operation of single system components as well as their cooperation. To this purpose, modeling and numerical simulation are regarded as increasingly useful or even as indispensable. Problem-oriented modeling does not only reduce the number of costly and time-consuming experimental trial-and-error steps, but it also lends unique insight into the interior of a miniaturized device showing the distributions of various physical quantities which are not readily accessible to experiments. Future work has mostly to concentrate on a user-friendly modular 'CAD tool box' based on the concepts of 'tailored modeling'. This implies not only modern flexible software techniques and highly efficient computational methods, but in particular new methodologies for fast and reliable model validation and the availability of a process-oriented material-property data base.
UR - https://www.scopus.com/pages/publications/0028406634
U2 - 10.1016/0924-4247(94)80124-X
DO - 10.1016/0924-4247(94)80124-X
M3 - Article
AN - SCOPUS:0028406634
SN - 0924-4247
VL - 41
SP - 279
EP - 283
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
IS - 1-3
ER -