Predictive Modelling of Emitter Systems in Photoacoustic Gas Sensing

Simon Essing, Tobias Mittereder, David Tumpold, Gabriele Schrag

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The ever-increasing demand for low-cost air quality sensors paved the way for miniaturized photoacoustic spectroscopy (PAS) gas sensors. We present a sophisticated system model to predict the optical output of a critical component of a PAS sensor - the infrared (IR) emitter, suited to optimize the overall system stability further. It consists of validated sub-models of the microheater, the optical filter, and the optical path in between. It is verified by measurements of the emitter output for a wide range of gas concentrations below 10.000 ppm inside the emitter.

Original languageEnglish
Title of host publication2023 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2023
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350341317
DOIs
StatePublished - 2023
Event2023 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2023 - Valetta, Malta
Duration: 28 May 202331 May 2023

Publication series

Name2023 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2023

Conference

Conference2023 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2023
Country/TerritoryMalta
CityValetta
Period28/05/2331/05/23

Keywords

  • IR-emitter
  • gas sensor
  • photoacoustic
  • system modeling

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