Prädiktive Modelle für IR-Emitter in der miniaturisierten photoakustischen Gassensorik

Translated title of the contribution: Utilizing Predictive Models for IR Emitters in Miniaturized Photoacoustic Gas Sensing

Simon Essing, Gabriele Schrag, Tobias Mittereder, David Tumpold

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The ever-increasing demand for low-cost air quality sensors has paved the way for miniaturized photoacoustic spectroscopy (PAS) gas sensors. We present a system model for predicting the optical performance of an essential component of a PAS sensor, the infrared emitter (IR emitter), which is suitable for further optimizing the overall system's stability. It consists of validated submodels of the microheater, the optical filter, and the in-between optical path. It is verified by measurements of the emitter's performance for a wide range of gas concentrations below 10 000 ppm inside the emitter.

Translated title of the contributionUtilizing Predictive Models for IR Emitters in Miniaturized Photoacoustic Gas Sensing
Original languageGerman
Title of host publicationMikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings
PublisherVDE VERLAG GMBH
Pages74-77
Number of pages4
ISBN (Electronic)9783800762040
StatePublished - 2023
EventMikroSystemTechnik Kongress 2023: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat MicroSystems Technology Congress 2023: Microelectronics, Microsystems Technology and their Applications - Sustainability and Technology Sovereignty - Dresden, Germany
Duration: 23 Oct 202325 Oct 2023

Publication series

NameMikroSystemTechnik Kongress 2023 - Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat, Proceedings

Conference

ConferenceMikroSystemTechnik Kongress 2023: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouveranitat MicroSystems Technology Congress 2023: Microelectronics, Microsystems Technology and their Applications - Sustainability and Technology Sovereignty
Country/TerritoryGermany
CityDresden
Period23/10/2325/10/23

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