Positioning strategies and sensor integration in tools for assembling MOEMS

Gunther Reinhart; Dirk Jacob

doi:10.1117/12.396513

Positioning strategies and sensor integration in tools for assembling MOEMS

Gunther Reinhart
, Dirk Jacob

Chair of Sustainable Production

Technical University of Munich

Research output: Contribution to journal › Conference article › peer-review

3 Scopus citations

Abstract

Assembly is a crucial process during the production of microsystems. Especially automated and economic assembly of flip-chip at small and medium batch sizes is not solved at the moment in industry. For flexible and economic assembly of standard and flip-chip elements a tool was developed, which makes it possible to assemble MOEMS with an accuracy of less than 8 micrometers by a standard industrial robot. This is done by integrating a fine positioning drive and sensors into the tool. Moreover, a special optics module for the assembly of flip-chip elements was developed, which can be used in different positioning devices in a manual and automatic modus.

Original language	English
Pages (from-to)	395-402
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4178
DOIs	https://doi.org/10.1117/12.396513
State	Published - 2000
Event	MOEMS and Miniaturized Systems 2000 - Santa Clara, United States Duration: 18 Sep 2000 → 21 Sep 2000

Keywords

Flip-chip assembly
Micro-assembly
Optic development
Positioning strategies
Sensor integration
Tool development

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10.1117/12.396513

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@article{3f957df5e3f44d3fbf8965b8d9785cc3,

title = "Positioning strategies and sensor integration in tools for assembling MOEMS",

abstract = "Assembly is a crucial process during the production of microsystems. Especially automated and economic assembly of flip-chip at small and medium batch sizes is not solved at the moment in industry. For flexible and economic assembly of standard and flip-chip elements a tool was developed, which makes it possible to assemble MOEMS with an accuracy of less than 8 micrometers by a standard industrial robot. This is done by integrating a fine positioning drive and sensors into the tool. Moreover, a special optics module for the assembly of flip-chip elements was developed, which can be used in different positioning devices in a manual and automatic modus.",

keywords = "Flip-chip assembly, Micro-assembly, Optic development, Positioning strategies, Sensor integration, Tool development",

author = "Gunther Reinhart and Dirk Jacob",

note = "Publisher Copyright: {\textcopyright} COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.; MOEMS and Miniaturized Systems 2000 ; Conference date: 18-09-2000 Through 21-09-2000",

year = "2000",

doi = "10.1117/12.396513",

language = "English",

volume = "4178",

pages = "395--402",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Positioning strategies and sensor integration in tools for assembling MOEMS

AU - Reinhart, Gunther

AU - Jacob, Dirk

N1 - Publisher Copyright: © COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.

PY - 2000

Y1 - 2000

N2 - Assembly is a crucial process during the production of microsystems. Especially automated and economic assembly of flip-chip at small and medium batch sizes is not solved at the moment in industry. For flexible and economic assembly of standard and flip-chip elements a tool was developed, which makes it possible to assemble MOEMS with an accuracy of less than 8 micrometers by a standard industrial robot. This is done by integrating a fine positioning drive and sensors into the tool. Moreover, a special optics module for the assembly of flip-chip elements was developed, which can be used in different positioning devices in a manual and automatic modus.

AB - Assembly is a crucial process during the production of microsystems. Especially automated and economic assembly of flip-chip at small and medium batch sizes is not solved at the moment in industry. For flexible and economic assembly of standard and flip-chip elements a tool was developed, which makes it possible to assemble MOEMS with an accuracy of less than 8 micrometers by a standard industrial robot. This is done by integrating a fine positioning drive and sensors into the tool. Moreover, a special optics module for the assembly of flip-chip elements was developed, which can be used in different positioning devices in a manual and automatic modus.

KW - Flip-chip assembly

KW - Micro-assembly

KW - Optic development

KW - Positioning strategies

KW - Sensor integration

KW - Tool development

UR - https://www.scopus.com/pages/publications/0010945933

U2 - 10.1117/12.396513

DO - 10.1117/12.396513

M3 - Conference article

AN - SCOPUS:0010945933

SN - 0277-786X

VL - 4178

SP - 395

EP - 402

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - MOEMS and Miniaturized Systems 2000

Y2 - 18 September 2000 through 21 September 2000

ER -

Positioning strategies and sensor integration in tools for assembling MOEMS

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Keywords

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