TY - JOUR
T1 - Plasma enhanced-CVD of undoped and fluorine-doped Co3O 4 nanosystems for novel gas sensors
AU - Barreca, Davide
AU - Bekermann, Daniela
AU - Comini, Elisabetta
AU - Devi, Anjana
AU - Fischer, Roland A.
AU - Gasparotto, Alberto
AU - Gavagnin, Marco
AU - MacCato, Chiara
AU - Sada, Cinzia
AU - Sberveglieri, Giorgio
AU - Tondello, Eugenio
N1 - Funding Information:
D. Bekermann received her M.Sc. degree in Chemistry (Functional Materials) at the Ruhr-University Bochum (Germany) in 2008. She is actually carrying on her PhD studies at the Bochum Ruhr-University and at Padova University, supported by a fellowship from the European Community's Seventh Framework Programme (FP7/2007–2013) and SFB 558. Her main research interest is devoted to the synthesis of metal oxide-based nanostructures for optical, gas sensing and photocatalytic applications by MOCVD and PE-CVD.
Funding Information:
The research leading to these results has received funding from the European Community's Seventh Framework Program (FP7/2007-2013; Grant Agreement No. ENHANCE-238409 ). PRIN-COFIN 2008 and Padova University PRAT 2008/2010 projects provided further financial support. Thanks are also due to Mr. A. Ravazzolo (CNR-ISTM, Padova University, Italy) for technical assistance.
PY - 2011/12/15
Y1 - 2011/12/15
N2 - Co3O4-based nanosystems were prepared on polycrystalline Al2O3 by plasma enhanced-chemical vapor deposition (PE-CVD), at temperatures ranging between 200 and 400 °C. The use of two different precursors, Co(dpm)2 (dpm = 2,2,6,6-tetramethyl-3, 5-heptanedionate) and Co(hfa)2·TMEDA (hfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate; TMEDA = N,N,N′,N′- tetramethylethylenediamine) enabled the synthesis of undoped and fluorine-doped Co3O4 specimens, respectively. A thorough characterization of their properties was performed by glancing incidence X-ray diffraction (GIXRD), atomic force microscopy (AFM), field emission-scanning electron microscopy (FE-SEM), secondary ion mass spectrometry (SIMS) and X-ray photoelectron spectroscopy (XPS). For the first time, the gas sensing properties of such PE-CVD nanosystems were investigated in the detection of ethanol and acetone. The results show an appreciable response improvement upon doping and functional performances directly dependent on the fluorine content in the Co3O4 system.
AB - Co3O4-based nanosystems were prepared on polycrystalline Al2O3 by plasma enhanced-chemical vapor deposition (PE-CVD), at temperatures ranging between 200 and 400 °C. The use of two different precursors, Co(dpm)2 (dpm = 2,2,6,6-tetramethyl-3, 5-heptanedionate) and Co(hfa)2·TMEDA (hfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate; TMEDA = N,N,N′,N′- tetramethylethylenediamine) enabled the synthesis of undoped and fluorine-doped Co3O4 specimens, respectively. A thorough characterization of their properties was performed by glancing incidence X-ray diffraction (GIXRD), atomic force microscopy (AFM), field emission-scanning electron microscopy (FE-SEM), secondary ion mass spectrometry (SIMS) and X-ray photoelectron spectroscopy (XPS). For the first time, the gas sensing properties of such PE-CVD nanosystems were investigated in the detection of ethanol and acetone. The results show an appreciable response improvement upon doping and functional performances directly dependent on the fluorine content in the Co3O4 system.
KW - CoO
KW - Fluorine doping
KW - Gas sensors
KW - Plasma enhanced-chemical vapor deposition
UR - https://www.scopus.com/pages/publications/81155131054
U2 - 10.1016/j.snb.2011.07.016
DO - 10.1016/j.snb.2011.07.016
M3 - Article
AN - SCOPUS:81155131054
SN - 0925-4005
VL - 160
SP - 79
EP - 86
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
IS - 1
ER -