| Original language | German |
|---|---|
| Pages (from-to) | 309-315 |
| Number of pages | 7 |
| Journal | VDI Berichte |
| Issue number | 1530 |
| State | Published - 2000 |
Planarer Vakuumsensor
G. Bedö, B. Bayha, D. Schmitt-Landsiedel
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations