Physically based modeling of squeeze film damping by mixed-level system simulation

Research output: Contribution to journalConference articlepeer-review

65 Scopus citations

Abstract

We propose a mixed-level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which enables the inclusion of these effects in system-level models of entire microsystems. Our treatment of SQFD follows a natural physically based and flexible methodology, which also allows for complex geometries and coupling between different energy and signal domains. The proposed damping model is realized in VHDL-AMS and, therefore, can easily be included in system-level models for full system simulation. Results obtained for elementary and complex microstructures show excellent agreement with 3D Navier-Stokes-based FEM simulations, but are computationally by far less expensive, thus proving the quality and power of our approach.

Original languageEnglish
Pages (from-to)193-200
Number of pages8
JournalSensors and Actuators, A: Physical
Volume97-98
DOIs
StatePublished - 1 Apr 2002
EventTransducers'01 Eurosensors XV - Munich, Germany
Duration: 10 Jun 200114 Jun 2001

Keywords

  • Compact modeling
  • Mixed-level simulation
  • Squeeze film damping effects

Fingerprint

Dive into the research topics of 'Physically based modeling of squeeze film damping by mixed-level system simulation'. Together they form a unique fingerprint.

Cite this