Physically based modeling of squeeze film damping by mixed-level system simulation

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65 Scopus citations


We propose a mixed-level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which enables the inclusion of these effects in system-level models of entire microsystems. Our treatment of SQFD follows a natural physically based and flexible methodology, which also allows for complex geometries and coupling between different energy and signal domains. The proposed damping model is realized in VHDL-AMS and, therefore, can easily be included in system-level models for full system simulation. Results obtained for elementary and complex microstructures show excellent agreement with 3D Navier-Stokes-based FEM simulations, but are computationally by far less expensive, thus proving the quality and power of our approach.

Original languageEnglish
Pages (from-to)193-200
Number of pages8
JournalSensors and Actuators, A: Physical
StatePublished - 1 Apr 2002
EventTransducers'01 Eurosensors XV - Munich, Germany
Duration: 10 Jun 200114 Jun 2001


  • Compact modeling
  • Mixed-level simulation
  • Squeeze film damping effects


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