Physically-based high-level system model of a MEMS-gyroscope for the efficient design of control algorithms

We present a high-level model of a dual gimbaled mass gyroscope, which provides an accurate physical description of the impact of external and internal disturbances on the output signal, but which also allows for the efficient analysis and optimization of the full sensor system including the electronic circuitry for drive, control, and signal conditioning. The dynamics of the gyroscope is described by a reduced-order high-level model. Internal disturbances (manufacturing tolerances, e.g.) as well as external impact factors (pressure-dependent viscous damping, shock, vibrations of the housing, etc.) are included in the model equations by introducing physically-based, parameterized functions extracted from detailed FEM or mixed-level simulations. Exemplary simulations investigating the impact of package vibrations on the sensor output signal prove the efficiency of our model and the practicality of our approach.