Photoelektronen-Spektren und Moleküleigenschaften. CXXXI. C(SiH3)4, HC(SiH3)3 und (H3C)HC(SiH3)2

Hans Bock, Matthias Kremer, Hubert Schmidbaur

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The compounds C(SiH3)4, HC(SiH3)3 and (H3C)HC(SiH3)2 are potential feedstock gases for the decomposition to amorphous hydrogenated silicon carbide thin films. The He(I) photoelectron spectra of the molecules are assigned both by radical cation state comparison with the homologous hydrocarbons neopentane and isobutane as well as by Koopmans' correlation with MNDO eigenvalues. The difference in effective nuclear charges, C > Si, causes distinct changes, e.g. the 2sC ionisations are lowered by about 2 eV. On heating in a low-pressure flow system, C(SiH3)4 at 1000 K splits off H3SiSiH3 + H2 and a brown CVD film forms on the surface of the reactor.

Original languageGerman
Pages (from-to)1-11
Number of pages11
JournalJournal of Organometallic Chemistry
Issue number1
StatePublished - 12 May 1992
Externally publishedYes

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