Patterning of YBa2Cu3O7-δ films using a near-field optical configuration

  • J. D. Pedarnig
  • , H. Göttlich
  • , R. Rössler
  • , W. M. Heckl
  • , D. Bäuerle

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

Thin superconducting YBa2Cu3O7-δ films have been patterned by means of an arrangement employed in scanning near-field optical microscopy (SNOM). Standard SNOM probes were modified to achieve high transmission for direct writing by oxygen depletion in N2 atmosphere. The written lines are about 1.5 μm wide and show a semiconductor-like resistivity behavior (δ ≥ 0.5). The morphology of illuminated regions is about the same as that of the YBCO films.

Original languageEnglish
Pages (from-to)403-405
Number of pages3
JournalApplied Physics A: Materials Science and Processing
Volume67
Issue number4
DOIs
StatePublished - 1998
Externally publishedYes

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