Abstract
Thin superconducting YBa2Cu3O7-δ films have been patterned by means of an arrangement employed in scanning near-field optical microscopy (SNOM). Standard SNOM probes were modified to achieve high transmission for direct writing by oxygen depletion in N2 atmosphere. The written lines are about 1.5 μm wide and show a semiconductor-like resistivity behavior (δ ≥ 0.5). The morphology of illuminated regions is about the same as that of the YBCO films.
| Original language | English |
|---|---|
| Pages (from-to) | 403-405 |
| Number of pages | 3 |
| Journal | Applied Physics A: Materials Science and Processing |
| Volume | 67 |
| Issue number | 4 |
| DOIs | |
| State | Published - 1998 |
| Externally published | Yes |