Paramagnetic states in μc-SiC:H thin films prepared by Hot-Wire CVD at low temperatures

Keyphrases

• Low Temperature 100%
• Paramagnetic State 100%
• Hot Filament CVD 100%
• Crystal Fractionation 66%
• P-type 66%
• Undoped 66%
• ESR Spectra 66%
• Order of Magnitude 33%
• High Density 33%
• Electrical Conductivity 33%
• Crystallinity 33%
• Low Crystallinity 33%
• Highly Crystalline 33%
• Crystal Growth 33%
• Microcrystalline 33%
• High Doping 33%
• P-type Doping 33%
• Fermi Level Position 33%
• Spin-wave Resonance 33%
• Clear Effect 33%
• Al-doped 33%
• Conductivity Increase 33%
• Hot Filament Chemical Vapor Deposition (HFCVD) 33%
• Hydrogenated Silicon Carbide 33%

Material Science

• Chemical Vapor Deposition 100%
• Volume Fraction 100%
• Thin Films 100%
• Density 50%
• Silicon Carbide 50%
• Electrical Conductivity 50%
• Linewidth 50%
• Crystal Growth 50%