Organometallic chemical vapor deposition of germanium from a cyclic germylene, 1,3-di-tert-butyl-1,3,2-diazagermolidin-2-ylidine

S. Vepřek; J. Prokop; F. Glatz; R. Merica; F. R. Klingan; W. A. Herrmann

doi:10.1021/cm9503801

Organometallic chemical vapor deposition of germanium from a cyclic germylene, 1,3-di-tert-butyl-1,3,2-diazagermolidin-2-ylidine

S. Vepřek, J. Prokop, F. Glatz, R. Merica, F. R. Klingan, W. A. Herrmann

Technical University of Munich

Technical University of Munich

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29 Scopus citations

Abstract

Investigations into the kinetics and mechanism of the thermal decomposition of the novel organometallic precursor 1,3-di-tert-butyl-1,3,2-diazagarmolidin-2-ylidine are reported. On the basis of these results, thin films of surprisingly pure amorphous germanium were deposited at temperatures between about 140 and 440°C. A high selectivity of the deposition on a Si surface as compared with SiO₂ was obtained.

Original language	English
Pages (from-to)	825-831
Number of pages	7
Journal	Chemistry of Materials
Volume	8
Issue number	4
DOIs	https://doi.org/10.1021/cm9503801
State	Published - Apr 1996

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title = "Organometallic chemical vapor deposition of germanium from a cyclic germylene, 1,3-di-tert-butyl-1,3,2-diazagermolidin-2-ylidine",

abstract = "Investigations into the kinetics and mechanism of the thermal decomposition of the novel organometallic precursor 1,3-di-tert-butyl-1,3,2-diazagarmolidin-2-ylidine are reported. On the basis of these results, thin films of surprisingly pure amorphous germanium were deposited at temperatures between about 140 and 440°C. A high selectivity of the deposition on a Si surface as compared with SiO2 was obtained.",

author = "S. Vep{\v r}ek and J. Prokop and F. Glatz and R. Merica and Klingan, {F. R.} and Herrmann, {W. A.}",

year = "1996",

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T1 - Organometallic chemical vapor deposition of germanium from a cyclic germylene, 1,3-di-tert-butyl-1,3,2-diazagermolidin-2-ylidine

AU - Vepřek, S.

AU - Prokop, J.

AU - Glatz, F.

AU - Merica, R.

AU - Klingan, F. R.

AU - Herrmann, W. A.

PY - 1996/4

Y1 - 1996/4

N2 - Investigations into the kinetics and mechanism of the thermal decomposition of the novel organometallic precursor 1,3-di-tert-butyl-1,3,2-diazagarmolidin-2-ylidine are reported. On the basis of these results, thin films of surprisingly pure amorphous germanium were deposited at temperatures between about 140 and 440°C. A high selectivity of the deposition on a Si surface as compared with SiO2 was obtained.

AB - Investigations into the kinetics and mechanism of the thermal decomposition of the novel organometallic precursor 1,3-di-tert-butyl-1,3,2-diazagarmolidin-2-ylidine are reported. On the basis of these results, thin films of surprisingly pure amorphous germanium were deposited at temperatures between about 140 and 440°C. A high selectivity of the deposition on a Si surface as compared with SiO2 was obtained.

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DO - 10.1021/cm9503801

M3 - Article

AN - SCOPUS:0038898287

SN - 0897-4756

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JF - Chemistry of Materials

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ER -

Organometallic chemical vapor deposition of germanium from a cyclic germylene, 1,3-di-tert-butyl-1,3,2-diazagermolidin-2-ylidine

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