@inproceedings{ecf76ff2d9914184ba671f1e9320985e,
title = "Optimization of the electrical excitation for a bionically inspired fluid-actuator",
abstract = "We investigate a micromechanical bending actuator that generates a fluid flow through piezoelectric excitation of segmented electrodes. The bio-inspired structure is supposed to wave like the caudal fin of fish (the so-called undulatory movement), as the movement pattern enables a high degree of efficiency. We have developed a method to optimize the electrical stimulation of the actuator and thus evoke undulatory movement. As a result, we can describe the relationship between electrical stimulation and the resulting movement of the structure. We successfully validated the results of this approach by laser interferometry measurements.",
keywords = "MEMS, fluid actuator, laser doppler vibrometry, piezoelectricity, thin-film, undulation",
author = "Robert Annuth and Wolfgang Holzl and Gabriele Bosetti and Gabriele Schrag",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021 ; Conference date: 25-08-2021 Through 27-08-2021",
year = "2021",
month = aug,
day = "25",
doi = "10.1109/DTIP54218.2021.9568497",
language = "English",
series = "2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021",
}