Optimierung industrieller mikrosysteme mit hilfe maßgeschneiderter modelle: Systemsimulation eines silizium-mikrophons

We demonstrate that a comprehensive, physically based system-level approach based on the generalized Kirchhoffian network theory constitutes a reliable basis for the optimization of enhanced industrial MEMS devices and systems. The combination of distributed and lumped system-level models offers detailed insight in the device operation while, at the same time, keeping the computational expense low. The possibility to implement these models into standard system simulators facilitates the co-simulation with the electronic circuitry. The benefits of this modular, tailored system-level modeling approach, which combines lumped with distributed models, are exemplified by applying it to an industrial capacitive silicon microphone. This way, all important microphone characteristics can be investigated by the presented model and design measures can be identified towards optimized performance w.r.t a higher signal-to-noise ratio, one of the most important key figures for microphone design.