On the reflectivity of reactively sputtered Ni/Ti multilayers

M. Senthil Kumar, P. Böni, S. Tixier

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

X-ray and neutron reflectivities of multilayers are strongly influenced by interfacial properties. Typical examples are Ni/Ti multilayers sputtered in Ar showing low reflectivity because of the large interface roughness and interdiffusion. Reactive sputtering of Ni layers in an Ar/air mixture has been chosen for accomplishing the task of improving the reflectivity. Bilayer samples with 20 and 300 periods, sputtered at different air flows clearly demonstrate a substantial change in the interface structure as confirmed by the X-ray reflectivity measurements. The contour maps of the diffuse X-ray scattering data also exhibit similar features. These findings are also supported by neutron reflectivity data on supermirrors.

Original languageEnglish
Pages (from-to)53-55
Number of pages3
JournalPhysica B: Condensed Matter
Volume248
Issue number1-4
DOIs
StatePublished - 15 Jun 1998
Externally publishedYes

Keywords

  • Interfaces
  • Neutron supermirror
  • Ni/Ti multilayer
  • Reflectivity

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