Abstract
We present a finite element formulation for simulation of electromechanical coupling using a combination of fictitious domain and level set methods. The electric field is treated with a fixed (Eulerian-like) mesh, whereas the structure (taken as a perfect conductor) is modelled with a conventional Lagrangian approach. The compatibility between the potential of the conductor and of the electric domain is obtained by introducing a Lagrange multiplier function, defined on the boundary of the conductor. The electromechanical forces are obtained using a variational formulation for the coupled electromechanical domain. We use a Heaviside function on the level set to remove the electric energy in the conductor domain. Results are presented for an radio frequency switch and an element of a comb drive.
Original language | English |
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Pages (from-to) | 478-506 |
Number of pages | 29 |
Journal | International Journal for Numerical Methods in Engineering |
Volume | 80 |
Issue number | 4 |
DOIs | |
State | Published - 22 Oct 2009 |
Externally published | Yes |
Keywords
- Electromechanical coupling
- Fictitious domain method
- Finite element method
- Lagrange multipliers
- Level set method
- Micro-electro mechanical systems