Numerical modeling of the electromechanical interaction in MEMS

S. D.A. Hannot, D. J. Rixen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations


Microsystems or Micro-Electro-Mechanical Systems (MEMS) are small (micrometersize) machines usually built by lithographic technologies originally developed for microchips. MEMS are designed to integrate sensing and actuation (and evendata processing) on a single chip, therefore they often include moving and deforming parts. Currently microsystem technologies are used for a wide variety of purposes such as: read/write heads in hard-disk drives, ink-jet printheads, Digital Light Processing (DLP) chips in video projection systems and several types of sensors for pressure, flow, acceleration or bio-elements.

Original languageEnglish
Title of host publicationAdvanced Computational Methods in Science and Engineering
Number of pages28
StatePublished - 2010
Externally publishedYes

Publication series

NameLecture Notes in Electrical Engineering
Volume71 LNCSE
ISSN (Print)1876-1100
ISSN (Electronic)1876-1119


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