TY - GEN
T1 - Numerical modeling of the electromechanical interaction in MEMS
AU - Hannot, S. D.A.
AU - Rixen, D. J.
PY - 2010
Y1 - 2010
N2 - Microsystems or Micro-Electro-Mechanical Systems (MEMS) are small (micrometersize) machines usually built by lithographic technologies originally developed for microchips. MEMS are designed to integrate sensing and actuation (and evendata processing) on a single chip, therefore they often include moving and deforming parts. Currently microsystem technologies are used for a wide variety of purposes such as: read/write heads in hard-disk drives, ink-jet printheads, Digital Light Processing (DLP) chips in video projection systems and several types of sensors for pressure, flow, acceleration or bio-elements.
AB - Microsystems or Micro-Electro-Mechanical Systems (MEMS) are small (micrometersize) machines usually built by lithographic technologies originally developed for microchips. MEMS are designed to integrate sensing and actuation (and evendata processing) on a single chip, therefore they often include moving and deforming parts. Currently microsystem technologies are used for a wide variety of purposes such as: read/write heads in hard-disk drives, ink-jet printheads, Digital Light Processing (DLP) chips in video projection systems and several types of sensors for pressure, flow, acceleration or bio-elements.
UR - http://www.scopus.com/inward/record.url?scp=78651554894&partnerID=8YFLogxK
U2 - 10.1007/978-3-642-03344-5-11
DO - 10.1007/978-3-642-03344-5-11
M3 - Conference contribution
AN - SCOPUS:78651554894
SN - 9783642033438
T3 - Lecture Notes in Electrical Engineering
SP - 315
EP - 342
BT - Advanced Computational Methods in Science and Engineering
ER -