@inbook{45670238a67341a1b73fc63639bd3bda,
title = "Numerical modeling of the electromechanical interaction in MEMS",
abstract = "Microsystems or Micro–Electro–Mechanical Systems (MEMS) are small (micrometersize) machines usually built by lithographic technologies originally developed for microchips. MEMS are designed to integrate sensing and actuation (and evendata processing) on a single chip, therefore they often include moving and deforming parts. Currently microsystem technologies are used for a wide variety of purposes such as: read/write heads in hard-disk drives, ink-jet printheads, Digital Light Processing (DLP) chips in video projection systems and several types of sensors for pressure, flow, acceleration or bio-elements.",
author = "Hannot, {S. D.A.} and Rixen, {D. J.}",
note = "Publisher Copyright: {\textcopyright} 2009, Springer-Verlag Berlin Heidelberg.",
year = "2010",
doi = "10.1007/978-3-642-03344-5_11",
language = "English",
series = "Lecture Notes in Computational Science and Engineering",
publisher = "Springer Verlag",
pages = "315--342",
booktitle = "Lecture Notes in Computational Science and Engineering",
}