Numerical modeling of the electromechanical interaction in MEMS

S. D.A. Hannot, D. J. Rixen

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

3 Scopus citations

Abstract

Microsystems or Micro–Electro–Mechanical Systems (MEMS) are small (micrometersize) machines usually built by lithographic technologies originally developed for microchips. MEMS are designed to integrate sensing and actuation (and evendata processing) on a single chip, therefore they often include moving and deforming parts. Currently microsystem technologies are used for a wide variety of purposes such as: read/write heads in hard-disk drives, ink-jet printheads, Digital Light Processing (DLP) chips in video projection systems and several types of sensors for pressure, flow, acceleration or bio-elements.

Original languageEnglish
Title of host publicationLecture Notes in Computational Science and Engineering
PublisherSpringer Verlag
Pages315-342
Number of pages28
DOIs
StatePublished - 2010
Externally publishedYes

Publication series

NameLecture Notes in Computational Science and Engineering
Volume71
ISSN (Print)1439-7358

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