Numerical methods for the high-frequency analysis of MEMS capacitive switches

L. Vietzorreck; F. Coccetti; V. Chtchekatourov; P. Russer

doi:10.1109/SMIC.2000.844314

Numerical methods for the high-frequency analysis of MEMS capacitive switches

L. Vietzorreck
, F. Coccetti
, V. Chtchekatourov
, P. Russer

Technical University of Munich

Technical University of Munich

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

In the present paper we analyze the high-frequency behaviour of a microelectromechanical capacitive switch by the transmission line matrix method (TLM) and by the method of lines (MoL). The numerical methods will be presented, especially the means which are necessary to avoid long calculation times and make the methods useful for an efficient design of the proposed structures. The obtained numerical results for the scattering parameters are compared with measurements in order to judge their accuracy.

Original language	English
Title of host publication	2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems
Editors	Walter Fisch, George E. Ponchak
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	123-124
Number of pages	2
ISBN (Electronic)	0780362551, 9780780362550
DOIs	https://doi.org/10.1109/SMIC.2000.844314
State	Published - 2000
Event	2nd Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, Silicon RF 2000 - Garmisch, Germany Duration: 28 Apr 2000 → …

Publication series

Name	2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems

Conference

Conference	2nd Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, Silicon RF 2000
Country/Territory	Germany
City	Garmisch
Period	28/04/00 → …

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10.1109/SMIC.2000.844314

Cite this

Vietzorreck, L., Coccetti, F., Chtchekatourov, V., & Russer, P. (2000). Numerical methods for the high-frequency analysis of MEMS capacitive switches. In W. Fisch, & G. E. Ponchak (Eds.), 2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (pp. 123-124). Article 844314 (2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMIC.2000.844314

Vietzorreck, L. ; Coccetti, F. ; Chtchekatourov, V. et al. / Numerical methods for the high-frequency analysis of MEMS capacitive switches. 2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems. editor / Walter Fisch ; George E. Ponchak. Institute of Electrical and Electronics Engineers Inc., 2000. pp. 123-124 (2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems).

@inproceedings{991f9ccd2e714bd580c9505626d722d6,

title = "Numerical methods for the high-frequency analysis of MEMS capacitive switches",

abstract = "In the present paper we analyze the high-frequency behaviour of a microelectromechanical capacitive switch by the transmission line matrix method (TLM) and by the method of lines (MoL). The numerical methods will be presented, especially the means which are necessary to avoid long calculation times and make the methods useful for an efficient design of the proposed structures. The obtained numerical results for the scattering parameters are compared with measurements in order to judge their accuracy.",

author = "L. Vietzorreck and F. Coccetti and V. Chtchekatourov and P. Russer",

note = "Publisher Copyright: {\textcopyright} 2000 IEEE.; 2nd Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, Silicon RF 2000 ; Conference date: 28-04-2000",

year = "2000",

doi = "10.1109/SMIC.2000.844314",

language = "English",

series = "2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems",

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Vietzorreck, L, Coccetti, F, Chtchekatourov, V & Russer, P 2000, Numerical methods for the high-frequency analysis of MEMS capacitive switches. in W Fisch & GE Ponchak (eds), 2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems., 844314, 2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, Institute of Electrical and Electronics Engineers Inc., pp. 123-124, 2nd Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, Silicon RF 2000, Garmisch, Germany, 28/04/00. https://doi.org/10.1109/SMIC.2000.844314

Numerical methods for the high-frequency analysis of MEMS capacitive switches. / Vietzorreck, L.; Coccetti, F.; Chtchekatourov, V. et al.
2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems. ed. / Walter Fisch; George E. Ponchak. Institute of Electrical and Electronics Engineers Inc., 2000. p. 123-124 844314 (2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

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AU - Vietzorreck, L.

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AU - Chtchekatourov, V.

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PY - 2000

Y1 - 2000

N2 - In the present paper we analyze the high-frequency behaviour of a microelectromechanical capacitive switch by the transmission line matrix method (TLM) and by the method of lines (MoL). The numerical methods will be presented, especially the means which are necessary to avoid long calculation times and make the methods useful for an efficient design of the proposed structures. The obtained numerical results for the scattering parameters are compared with measurements in order to judge their accuracy.

AB - In the present paper we analyze the high-frequency behaviour of a microelectromechanical capacitive switch by the transmission line matrix method (TLM) and by the method of lines (MoL). The numerical methods will be presented, especially the means which are necessary to avoid long calculation times and make the methods useful for an efficient design of the proposed structures. The obtained numerical results for the scattering parameters are compared with measurements in order to judge their accuracy.

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M3 - Conference contribution

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T3 - 2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems

SP - 123

EP - 124

BT - 2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems

A2 - Fisch, Walter

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PB - Institute of Electrical and Electronics Engineers Inc.

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ER -

Vietzorreck L, Coccetti F, Chtchekatourov V, Russer P. Numerical methods for the high-frequency analysis of MEMS capacitive switches. In Fisch W, Ponchak GE, editors, 2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems. Institute of Electrical and Electronics Engineers Inc. 2000. p. 123-124. 844314. (2000 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems). doi: 10.1109/SMIC.2000.844314

Numerical methods for the high-frequency analysis of MEMS capacitive switches

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