Numerical analysis of the nonlinear restoring force based on near-field acoustic levitation

Yuanyuan Liu, Minghui Shi, Kheirollah Sepahvand, Steffen Marburg

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The stability of the floating object is a key factor in near-field acoustic levitation, which has an extensive application prospect in manufacturing of micro-electromechanical system parts. This study presents a numerical study of the restoring force based on the theory of gas film lubrication. Finite difference scheme is used to solve the Reynolds equation considering the movement of reflector and to obtain the air pressure distribution. After coordinate transformation, the restoring force which acts on the levitator can be acquired. An experimental rig is constructed to measure the restoring force with different eccentricity. The experimental results show that the restoring force increases with the increase of eccentricity. The numerical results match well with experimental results.

Original languageEnglish
Title of host publicationProceedings of the 23rd International Congress on Acoustics
Subtitle of host publicationIntegrating 4th EAA Euroregio 2019
EditorsMartin Ochmann, Vorlander Michael, Janina Fels
PublisherInternational Commission for Acoustics (ICA)
Pages4769-4774
Number of pages6
ISBN (Electronic)9783939296157
DOIs
StatePublished - 2019
Event23rd International Congress on Acoustics: Integrating 4th EAA Euroregio, ICA 2019 - Aachen, Germany
Duration: 9 Sep 201923 Sep 2019

Publication series

NameProceedings of the International Congress on Acoustics
Volume2019-September
ISSN (Print)2226-7808
ISSN (Electronic)2415-1599

Conference

Conference23rd International Congress on Acoustics: Integrating 4th EAA Euroregio, ICA 2019
Country/TerritoryGermany
CityAachen
Period9/09/1923/09/19

Keywords

  • Acoustic levitation
  • Eccentricity
  • Restoring force

Fingerprint

Dive into the research topics of 'Numerical analysis of the nonlinear restoring force based on near-field acoustic levitation'. Together they form a unique fingerprint.

Cite this