Novel 2-chip-concept for micro-mechanically tunable long-wavelength VCSELs for the 1.55 μm wavelength range

Markus Maute, Frank Riemenschneider, Markus Ortsiefer, Robert Shau, Peter Meissner, Markus Christian Amann

Research output: Contribution to journalConference articlepeer-review

Abstract

In this paper, a novel two-chip-concept for an electrically pumped and micro-mechanically tunable vertical-cavity surface-emitting laser (VCSEL) operating in the 1.55 μm wavelength range is presented. One chip contains the active region with 5 quantum wells based on the material system AlGaInAs/ InP and a buried tunnel junction (BTJ) to provide current confinement and waveguiding. A dielectric mirror forms the back reflector. The second chip consists of a curved mirror membrane that can be displaced by electro-thermal heating. The main advantage of this approach is that both parts can be optimized separately. Packaged laser devices show continuous-wave operation at room temperature with an output power of up to 200 μW and very good side mode suppression in the order of 45 dB. Single-mode operation was observed across a tuning range of more than 30 nm.

Original languageEnglish
Article number25
Pages (from-to)240-248
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5453
DOIs
StatePublished - 2004
EventMicro-Optics, VCSELs, and Photonic Interconnects - Strasbourg, France
Duration: 27 Apr 200429 Apr 2004

Keywords

  • Buried tunnel junction
  • Micro-mechanically tunable laser
  • VCSEL

Fingerprint

Dive into the research topics of 'Novel 2-chip-concept for micro-mechanically tunable long-wavelength VCSELs for the 1.55 μm wavelength range'. Together they form a unique fingerprint.

Cite this