TY - GEN
T1 - Normally closed piezoelectric micro valve
AU - Zaehringer, Sandy
AU - Menacher, Markus
AU - Kirchner, Paul
AU - Schwesinger, Norbert
PY - 2010
Y1 - 2010
N2 - Based on a previously developed piezoelectric membrane actuator a normally closed piezoelectric micro valve was designed. The presented paper briefly explains the principle of this novel actuator and continues with the possible design of a normally closed piezoelectric micro valve. The actuator operates with surface electrodes. The thus generated electric field causes an inhomogeneous mechanical stress distribution within the piezoelectric material. Because of this the piezoelectric material is forced to deflect without any supporting passive membrane. If this actuator is placed smartly in a micro valve device a normally closed piezoelectric micro valve can be created, as will be shown in this paper.
AB - Based on a previously developed piezoelectric membrane actuator a normally closed piezoelectric micro valve was designed. The presented paper briefly explains the principle of this novel actuator and continues with the possible design of a normally closed piezoelectric micro valve. The actuator operates with surface electrodes. The thus generated electric field causes an inhomogeneous mechanical stress distribution within the piezoelectric material. Because of this the piezoelectric material is forced to deflect without any supporting passive membrane. If this actuator is placed smartly in a micro valve device a normally closed piezoelectric micro valve can be created, as will be shown in this paper.
UR - http://www.scopus.com/inward/record.url?scp=77957832743&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:77957832743
SN - 9782355000119
T3 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
SP - 105
EP - 109
BT - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
T2 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
Y2 - 5 May 2010 through 7 May 2010
ER -