Normally closed piezoelectric micro valve

Sandy Zaehringer, Markus Menacher, Paul Kirchner, Norbert Schwesinger

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

Based on a previously developed piezoelectric membrane actuator a normally closed piezoelectric micro valve was designed. The presented paper briefly explains the principle of this novel actuator and continues with the possible design of a normally closed piezoelectric micro valve. The actuator operates with surface electrodes. The thus generated electric field causes an inhomogeneous mechanical stress distribution within the piezoelectric material. Because of this the piezoelectric material is forced to deflect without any supporting passive membrane. If this actuator is placed smartly in a micro valve device a normally closed piezoelectric micro valve can be created, as will be shown in this paper.

Original languageEnglish
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
Pages105-109
Number of pages5
StatePublished - 2010
EventSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 - Seville, Spain
Duration: 5 May 20107 May 2010

Publication series

NameSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

Conference

ConferenceSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
Country/TerritorySpain
CitySeville
Period5/05/107/05/10

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