Non-linear model for the simulation of viscously damped RF-MEMS switches at varying ambient pressure conditions

Keyphrases

• Ambient Pressure 100%
• Pressure Condition 100%
• Nonlinear Model 100%
• RF MEMS Switch 100%
• Dynamic Response 50%
• Physically-based 50%
• Coupling Effect 50%
• Coupled Models 50%
• Predictive Simulation 50%
• Dynamic Operation 50%
• Gap Height 50%
• Multi-energy Domain 50%
• Electrostatic Spring Softening 50%

Engineering

• Ambient Pressure 100%
• Nonlinear Model 100%
• Microelectromechanical System 100%
• Dynamic Response 50%
• Good Agreement 50%
• Coupling Effect 50%
• Coupled Model 50%

Material Science

• Microelectromechanical System 100%