Non-linear model for the simulation of viscously damped RF-MEMS switches at varying ambient pressure conditions

M. Niessner; G. Schrag; G. Wachutka; J. Iannacci; T. Reutter; H. Mulatz

doi:10.1016/j.proche.2009.07.154

Non-linear model for the simulation of viscously damped RF-MEMS switches at varying ambient pressure conditions

M. Niessner, G. Schrag, G. Wachutka, J. Iannacci, T. Reutter, H. Mulatz

Research output: Contribution to journal › Conference article › peer-review

6 Scopus citations

Abstract

We present a physically-based multi-energy domain coupled model that allows for the predictive simulation of the dynamic response of electrostatically controlled and viscously damped RF-MEMS switches. The coupling effects occurring during dynamic operation, namely increased damping due to the decreasing gap height and electrostatic spring softening are correctly implemented in the model and, therefore, accurately reproduced. The model is able to account for varying ambient pressure conditions and shows good agreement with measurements ranging from 960hPa down to approx. 200hPa.

Original language	English
Pages (from-to)	618-621
Number of pages	4
Journal	Procedia Chemistry
Volume	1
Issue number	1
DOIs	https://doi.org/10.1016/j.proche.2009.07.154
State	Published - Sep 2009
Event	Eurosensors 23rd Conference - Lausanne, Switzerland Duration: 6 Sep 2009 → 9 Sep 2009

Keywords

RF-MEMS switch
experimental verficiation
gas film damping
mixed-level modeling
rarefaction

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10.1016/j.proche.2009.07.154

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title = "Non-linear model for the simulation of viscously damped RF-MEMS switches at varying ambient pressure conditions",

abstract = "We present a physically-based multi-energy domain coupled model that allows for the predictive simulation of the dynamic response of electrostatically controlled and viscously damped RF-MEMS switches. The coupling effects occurring during dynamic operation, namely increased damping due to the decreasing gap height and electrostatic spring softening are correctly implemented in the model and, therefore, accurately reproduced. The model is able to account for varying ambient pressure conditions and shows good agreement with measurements ranging from 960hPa down to approx. 200hPa.",

keywords = "RF-MEMS switch, experimental verficiation, gas film damping, mixed-level modeling, rarefaction",

author = "M. Niessner and G. Schrag and G. Wachutka and J. Iannacci and T. Reutter and H. Mulatz",

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T1 - Non-linear model for the simulation of viscously damped RF-MEMS switches at varying ambient pressure conditions

AU - Niessner, M.

AU - Schrag, G.

AU - Wachutka, G.

AU - Iannacci, J.

AU - Reutter, T.

AU - Mulatz, H.

PY - 2009/9

Y1 - 2009/9

N2 - We present a physically-based multi-energy domain coupled model that allows for the predictive simulation of the dynamic response of electrostatically controlled and viscously damped RF-MEMS switches. The coupling effects occurring during dynamic operation, namely increased damping due to the decreasing gap height and electrostatic spring softening are correctly implemented in the model and, therefore, accurately reproduced. The model is able to account for varying ambient pressure conditions and shows good agreement with measurements ranging from 960hPa down to approx. 200hPa.

AB - We present a physically-based multi-energy domain coupled model that allows for the predictive simulation of the dynamic response of electrostatically controlled and viscously damped RF-MEMS switches. The coupling effects occurring during dynamic operation, namely increased damping due to the decreasing gap height and electrostatic spring softening are correctly implemented in the model and, therefore, accurately reproduced. The model is able to account for varying ambient pressure conditions and shows good agreement with measurements ranging from 960hPa down to approx. 200hPa.

KW - RF-MEMS switch

KW - experimental verficiation

KW - gas film damping

KW - mixed-level modeling

KW - rarefaction

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SP - 618

EP - 621

JO - Procedia Chemistry

JF - Procedia Chemistry

IS - 1

T2 - Eurosensors 23rd Conference

Y2 - 6 September 2009 through 9 September 2009

ER -

Non-linear model for the simulation of viscously damped RF-MEMS switches at varying ambient pressure conditions

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Keywords

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