Non-contact handling for sensitive parts

Michael Heinz; Michael F. Zaeh

Non-contact handling for sensitive parts

Michael Heinz, Michael F. Zaeh

Chair of Machine Tools and Manufacturing Technology

Technical University of Munich

Research output: Contribution to conference › Paper › peer-review

1 Scopus citations

Original language	English
State	Published - 2007
Event	Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007 - Paris, France Duration: 27 Mar 2007 → 28 Mar 2007

Conference

Conference	Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007
Country/Territory	France
City	Paris
Period	27/03/07 → 28/03/07

Cite this

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title = "Non-contact handling for sensitive parts",

author = "Michael Heinz and Zaeh, {Michael F.}",

year = "2007",

language = "English",

note = "Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007 ; Conference date: 27-03-2007 Through 28-03-2007",

}

TY - CONF

T1 - Non-contact handling for sensitive parts

AU - Heinz, Michael

AU - Zaeh, Michael F.

PY - 2007

Y1 - 2007

UR - http://www.scopus.com/inward/record.url?scp=85028065237&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:85028065237

T2 - Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007

Y2 - 27 March 2007 through 28 March 2007

ER -

Non-contact handling for sensitive parts

Conference

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Cite this