Non-aqueous atomic layer deposition of SnO2 for gas sensing application

C. Marichy, R. M. Silva, N. Pinna, M. G. Willinger, N. Donato, G. Neri

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

Tin dioxide thin films are grown at low-moderate temperature using a non-hydrolytic atomic layer deposition process. Granular SnO2 thin films are obtained from tin(TV) tetra-butoxide reacting with acetic acid, at temperatures as low as 75 °C. Influence of pulse length of both reactants and of the deposition temperature on the saturation is studied. A narrow ALD window is established between 150 and 175 CC with a growth per cycle of 0.07 nm and with a linear growth as a function of the number of cycles. Above 200 °C decomposition of the tin precursor is not negligible. Microstructure and morphology of the as-prepared films as well as the influence of the deposition parameters are investigated using electron and atomic force microscopies. The band gap of the obtained films is determined using UV-visible spectroscopy. Finally the use of the SnO2 coated carbon nanotubes as gas sensing layer is discussed.

Original languageEnglish
Title of host publicationECS Transactions
EditorsFred Roozeboom, Stefan De Gendt, Jeffrey W. Elam, Jolien Dendooven, Oscar Van Der Straten, Chanyuan Liu, Andrea Illiberi
PublisherElectrochemical Society Inc.
Pages55-65
Number of pages11
Edition6
ISBN (Electronic)9781510871663, 9781607688525
DOIs
StatePublished - 2018
Externally publishedYes
EventSymposium on Atomic Layer Deposition Applications 14 - AiMES 2018, ECS and SMEQ Joint International Meeting - Cancun, Mexico
Duration: 30 Sep 20184 Oct 2018

Publication series

NameECS Transactions
Number6
Volume86
ISSN (Print)1938-6737
ISSN (Electronic)1938-5862

Conference

ConferenceSymposium on Atomic Layer Deposition Applications 14 - AiMES 2018, ECS and SMEQ Joint International Meeting
Country/TerritoryMexico
CityCancun
Period30/09/184/10/18

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