TY - GEN
T1 - No-Reference Image Quality Assessment for Reverse Engineering of Integrated Circuits
AU - Bette, Ann Christin
AU - Falter, Robin
AU - Ludwig, Matthias
AU - Lippmann, Bernhard
AU - Siegelin, Frank
AU - Egger, Peter
AU - Knoll, Alois
N1 - Publisher Copyright:
© 2023 IEEE.
PY - 2023
Y1 - 2023
N2 - Acquiring images of the layout of integrated circuits increases the demands on electron microscopy as the technology scaling continues. Each new chip generation makes producing stable and processable image quality more difficult. Currently, no automated, technology-agnostic solution supports the human operator in creating optimal layout images. Therefore, we propose an image quality assessment framework that determines the optimal microscope settings for each technology sample. We define the optimal settings as the minimum possible scan time, which still maintains the processability of the acquired images. The two implemented machine learning algorithms do not require a noise and distortion-free reference image. We compare both models on an updated version of the REFICS dataset and investigate their behavior for different noise types. Finally, we use our framework to fully recover the layout of a 28nm technology, reducing scan time by more than 95%.
AB - Acquiring images of the layout of integrated circuits increases the demands on electron microscopy as the technology scaling continues. Each new chip generation makes producing stable and processable image quality more difficult. Currently, no automated, technology-agnostic solution supports the human operator in creating optimal layout images. Therefore, we propose an image quality assessment framework that determines the optimal microscope settings for each technology sample. We define the optimal settings as the minimum possible scan time, which still maintains the processability of the acquired images. The two implemented machine learning algorithms do not require a noise and distortion-free reference image. We compare both models on an updated version of the REFICS dataset and investigate their behavior for different noise types. Finally, we use our framework to fully recover the layout of a 28nm technology, reducing scan time by more than 95%.
KW - IC image analysis
KW - IC reverse engineering
KW - Layout validation
KW - No-reference image quality assessment
KW - Physical inspection
KW - SEM imaging
UR - http://www.scopus.com/inward/record.url?scp=85173558360&partnerID=8YFLogxK
U2 - 10.1109/IPFA58228.2023.10249049
DO - 10.1109/IPFA58228.2023.10249049
M3 - Conference contribution
AN - SCOPUS:85173558360
T3 - Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
BT - 2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2023
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2023
Y2 - 24 July 2023 through 27 July 2023
ER -