Abstract
Superconducting Nb/AlOx/Nb tunnel junctions have been fabricated on Si membrane windows of only 1.2 μm thickness acting as substrates. The membrane windows with areas between (600 μm)2 and (1200 μm)2 remained undamaged after the different fabrications steps. The tunnel junctions positioned on the membranes and the bulk silicon substrate have very similar current-voltage characteristics. Using low-temperature scanning electron microscopy the two-dimensional heat diffusion process has been imaged in the detector geometry. This two-dimensional heat diffusion leads to a new cryoelectronic radiation detector concept combining high energy and spatial resolution with a large effective detector area. Applications of this detector concept include soft-x-ray spectroscopy and the nuclear β decay.
Original language | English |
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Pages (from-to) | 2659-2666 |
Number of pages | 8 |
Journal | Journal of Applied Physics |
Volume | 73 |
Issue number | 6 |
DOIs | |
State | Published - 1993 |
Externally published | Yes |