Nanostructured Dy2O3 films: An XPS Investigation

Davide Barreca; Alberto Gasparotto; Andrian Milanov; Eugenio Tondello; Anjana Devi; Roland A. Fischer

doi:10.1116/11.20080702

Nanostructured Dy₂O₃ films: An XPS Investigation

Davide Barreca, Alberto Gasparotto, Andrian Milanov, Eugenio Tondello, Anjana Devi, Roland A. Fischer

Research output: Contribution to journal › Article › peer-review

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Abstract

The present investigation is devoted to the X-ray photoelectron spectroscopy (XPS) analysis of the main core levels (C 1s, O 1s, Dy 4d, Dy 3d) of a representative dysprosium(III) oxide thin film. The specimen was grown on Si(100) at 500 °C by metal organic chemical vapor deposition (MOCVD) starting from Dy((iPrN)2CNMe2)3 in an N₂/O₂ atmosphere. The above route yielded uniform and homogeneous nanostructured Dy₂O₃ films characterized by a remarkable reactivity towards atmospheric CO₂ and H₂O, resulting in the surface co-presence of dysprosium carbonates/bicarbonates and hydroxides. The most relevant spectral features are presented and discussed.

Original language	English
Article number	SSSPEN000014000001000052000001
Pages (from-to)	52-59
Number of pages	8
Journal	Surface Science Spectra
Volume	14
Issue number	1-4
DOIs	https://doi.org/10.1116/11.20080702
State	Published - 2007
Externally published	Yes

Keywords

DyO
High-k
MOCVD
Nanosystems
X-ray photoelectron spectroscopy

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10.1116/11.20080702

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title = "Nanostructured Dy2O3 films: An XPS Investigation",

abstract = "The present investigation is devoted to the X-ray photoelectron spectroscopy (XPS) analysis of the main core levels (C 1s, O 1s, Dy 4d, Dy 3d) of a representative dysprosium(III) oxide thin film. The specimen was grown on Si(100) at 500 °C by metal organic chemical vapor deposition (MOCVD) starting from Dy((iPrN)2CNMe2)3 in an N2/O2 atmosphere. The above route yielded uniform and homogeneous nanostructured Dy2O3 films characterized by a remarkable reactivity towards atmospheric CO2 and H2O, resulting in the surface co-presence of dysprosium carbonates/bicarbonates and hydroxides. The most relevant spectral features are presented and discussed.",

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T2 - An XPS Investigation

AU - Barreca, Davide

AU - Gasparotto, Alberto

AU - Milanov, Andrian

AU - Tondello, Eugenio

AU - Devi, Anjana

AU - Fischer, Roland A.

PY - 2007

Y1 - 2007

N2 - The present investigation is devoted to the X-ray photoelectron spectroscopy (XPS) analysis of the main core levels (C 1s, O 1s, Dy 4d, Dy 3d) of a representative dysprosium(III) oxide thin film. The specimen was grown on Si(100) at 500 °C by metal organic chemical vapor deposition (MOCVD) starting from Dy((iPrN)2CNMe2)3 in an N2/O2 atmosphere. The above route yielded uniform and homogeneous nanostructured Dy2O3 films characterized by a remarkable reactivity towards atmospheric CO2 and H2O, resulting in the surface co-presence of dysprosium carbonates/bicarbonates and hydroxides. The most relevant spectral features are presented and discussed.

AB - The present investigation is devoted to the X-ray photoelectron spectroscopy (XPS) analysis of the main core levels (C 1s, O 1s, Dy 4d, Dy 3d) of a representative dysprosium(III) oxide thin film. The specimen was grown on Si(100) at 500 °C by metal organic chemical vapor deposition (MOCVD) starting from Dy((iPrN)2CNMe2)3 in an N2/O2 atmosphere. The above route yielded uniform and homogeneous nanostructured Dy2O3 films characterized by a remarkable reactivity towards atmospheric CO2 and H2O, resulting in the surface co-presence of dysprosium carbonates/bicarbonates and hydroxides. The most relevant spectral features are presented and discussed.

KW - DyO

KW - High-k

KW - MOCVD

KW - Nanosystems

KW - X-ray photoelectron spectroscopy

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Nanostructured Dy₂O₃ films: An XPS Investigation

Abstract

Keywords

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