@inproceedings{d155f5dccdd547cdba3eef770e6478f4,
title = "Nanopore cavity arrays on Silicon-on-Sapphire substrates for optical studies of transport across lipid membranes",
abstract = "We demonstrate the realization of a novel architecture of nanopore microcavity structures on Silicon-on-Sapphire (SOS) substrates. By advanced nanofabrication and anisotropic wet etching techniques, arrays of femtoliter cavities featuring both, a single nanopore in a top silicon nitride membrane and a transparent bottom, were fabricated. The cavities demonstrated excellent wetting behavior with electrolyte buffer solution and long-term stability of lipid bilayers that were suspended over the nanopores. Preliminary microscopy studies of membrane-enclosed fluorescence markers suggest our new platform for future multiplexed monitoring of membrane transport processes, at single protein resolution.",
keywords = "Microcavity, Nanofabrication, Nanopore, Silicon-on-sapphire, Suspended lipid bilayer",
author = "Nguyen, {Quoc Hung} and Michael Urban and Robert Tamp{\'e} and Marc Tornow",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 ; Conference date: 22-08-2016 Through 25-08-2016",
year = "2016",
month = nov,
day = "21",
doi = "10.1109/NANO.2016.7751392",
language = "English",
series = "16th International Conference on Nanotechnology - IEEE NANO 2016",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "74--76",
booktitle = "16th International Conference on Nanotechnology - IEEE NANO 2016",
}