Nanometer resolution of three-dimensional motions using video interference microscopy

W. Hemmert; M. S. Mermelstein; D. M. Freeman

doi:10.1109/memsys.1999.746842

Nanometer resolution of three-dimensional motions using video interference microscopy

W. Hemmert, M. S. Mermelstein, D. M. Freeman

Massachusetts Institute of Technology

Research output: Contribution to conference › Paper › peer-review

64 Scopus citations

Abstract

An interferometric video system for measuring microelectromechanical systems (MEMS) with nanometer resolution is demonstrated. Interferograms are generated by combining light reflected from the target with light reflected from a reference mirror. Motions are determined from sequences of stop-action interferograms obtained with stroboscopic illumination. The system was used to measure motions of a microfabricated accelerometer. In-plane motions were determined by analysis of brightfield images using gradient methods with subpixel resolution. Results are compared for brightfield images obtained by blocking light from the reference arm of the interferometer and for brightfield images reconstructed from interferograms. Out-of-plane motions are determined by analyzing interferograms obtained with different positions of the reference mirror. Results demonstrate nanometer resolution of in-plane motions and subnanometer resolution of out-of-plane motions.

Original language	English
Pages	302-308
Number of pages	7
DOIs	https://doi.org/10.1109/memsys.1999.746842
State	Published - 1999
Externally published	Yes
Event	Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS - Orlando, FL, USA Duration: 17 Jan 1999 → 21 Jan 1999

Conference

Conference	Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
City	Orlando, FL, USA
Period	17/01/99 → 21/01/99

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10.1109/memsys.1999.746842

Cite this

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title = "Nanometer resolution of three-dimensional motions using video interference microscopy",

abstract = "An interferometric video system for measuring microelectromechanical systems (MEMS) with nanometer resolution is demonstrated. Interferograms are generated by combining light reflected from the target with light reflected from a reference mirror. Motions are determined from sequences of stop-action interferograms obtained with stroboscopic illumination. The system was used to measure motions of a microfabricated accelerometer. In-plane motions were determined by analysis of brightfield images using gradient methods with subpixel resolution. Results are compared for brightfield images obtained by blocking light from the reference arm of the interferometer and for brightfield images reconstructed from interferograms. Out-of-plane motions are determined by analyzing interferograms obtained with different positions of the reference mirror. Results demonstrate nanometer resolution of in-plane motions and subnanometer resolution of out-of-plane motions.",

author = "W. Hemmert and Mermelstein, {M. S.} and Freeman, {D. M.}",

year = "1999",

doi = "10.1109/memsys.1999.746842",

language = "English",

pages = "302--308",

note = "Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS ; Conference date: 17-01-1999 Through 21-01-1999",

}

TY - CONF

T1 - Nanometer resolution of three-dimensional motions using video interference microscopy

AU - Hemmert, W.

AU - Mermelstein, M. S.

AU - Freeman, D. M.

PY - 1999

Y1 - 1999

N2 - An interferometric video system for measuring microelectromechanical systems (MEMS) with nanometer resolution is demonstrated. Interferograms are generated by combining light reflected from the target with light reflected from a reference mirror. Motions are determined from sequences of stop-action interferograms obtained with stroboscopic illumination. The system was used to measure motions of a microfabricated accelerometer. In-plane motions were determined by analysis of brightfield images using gradient methods with subpixel resolution. Results are compared for brightfield images obtained by blocking light from the reference arm of the interferometer and for brightfield images reconstructed from interferograms. Out-of-plane motions are determined by analyzing interferograms obtained with different positions of the reference mirror. Results demonstrate nanometer resolution of in-plane motions and subnanometer resolution of out-of-plane motions.

AB - An interferometric video system for measuring microelectromechanical systems (MEMS) with nanometer resolution is demonstrated. Interferograms are generated by combining light reflected from the target with light reflected from a reference mirror. Motions are determined from sequences of stop-action interferograms obtained with stroboscopic illumination. The system was used to measure motions of a microfabricated accelerometer. In-plane motions were determined by analysis of brightfield images using gradient methods with subpixel resolution. Results are compared for brightfield images obtained by blocking light from the reference arm of the interferometer and for brightfield images reconstructed from interferograms. Out-of-plane motions are determined by analyzing interferograms obtained with different positions of the reference mirror. Results demonstrate nanometer resolution of in-plane motions and subnanometer resolution of out-of-plane motions.

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U2 - 10.1109/memsys.1999.746842

DO - 10.1109/memsys.1999.746842

M3 - Paper

AN - SCOPUS:0032627177

SP - 302

EP - 308

T2 - Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS

Y2 - 17 January 1999 through 21 January 1999

ER -

Nanometer resolution of three-dimensional motions using video interference microscopy

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