TY - GEN
T1 - Nano-transfer printing of functioning MIM tunnel diodes
AU - Bareiß, Mario
AU - Weiler, Benedikt
AU - Kälblein, Daniel
AU - Zschieschang, Ute
AU - Klauk, Hagen
AU - Scarpa, Giuseppe
AU - Fabel, Bernhard
AU - Lugli, Paolo
AU - Porod, Wolfgang
PY - 2012
Y1 - 2012
N2 - Nano diodes show great potential for applications in detectors, communications and energy harvesting. In this work, we focus on nano transfer printing (nTP) to fabricate nm-scale diodes over extensive areas. Using a temperature-enhanced process, several millions of diodes were transfer-printed in one single step. We show the reliable transfer of functioning MIM diodes, which were electrically characterized by conductive Atomic Force Microscopy (c-AFM) measurements. Quantum-mechanical tunneling was determined to be the main conduction mechanism across the metal-oxide-metal junction.
AB - Nano diodes show great potential for applications in detectors, communications and energy harvesting. In this work, we focus on nano transfer printing (nTP) to fabricate nm-scale diodes over extensive areas. Using a temperature-enhanced process, several millions of diodes were transfer-printed in one single step. We show the reliable transfer of functioning MIM diodes, which were electrically characterized by conductive Atomic Force Microscopy (c-AFM) measurements. Quantum-mechanical tunneling was determined to be the main conduction mechanism across the metal-oxide-metal junction.
UR - http://www.scopus.com/inward/record.url?scp=84867226629&partnerID=8YFLogxK
U2 - 10.1109/SNW.2012.6243287
DO - 10.1109/SNW.2012.6243287
M3 - Conference contribution
AN - SCOPUS:84867226629
SN - 9781467309943
T3 - 2012 IEEE Silicon Nanoelectronics Workshop, SNW 2012
BT - 2012 IEEE Silicon Nanoelectronics Workshop, SNW 2012
T2 - 2012 17th IEEE Silicon Nanoelectronics Workshop, SNW 2012
Y2 - 10 June 2012 through 11 June 2012
ER -