My modeling nanocluster formation during ion beam synthesis

Chun Wei Yuan, Diana O. Yi, Ian D. Sharp, Swanee J. Shin, Christopher Y. Liao, Julian Guzman, Joel W. Ager, Eugene E. Haller, Daryl C. Chrzan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Ion beam synthesis of nanoclusters is studied via both kinetic Monte Carlo simulations and the self-consistent mean-field solution to a set of coupled rate equations. Both approaches predict a steady-state shape for the cluster size distribution that depends only on a characteristic length determined by the ratio of the effective diffusion coefficient times the effective solubility to the ion flux. The average cluster size in the steady state regime is determined by the implanted species/matrix interface energy.

Original languageEnglish
Title of host publicationIon Beams and Nano-Engineering
Number of pages6
StatePublished - 2010
Event2009 MRS Spring Meeting - San Francisco, CA, United States
Duration: 14 Apr 200917 Apr 2009

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


Conference2009 MRS Spring Meeting
Country/TerritoryUnited States
CitySan Francisco, CA


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