Abstract
We derive mathematical relations for hard X-ray moiré wavefront analysis with a grating interferometer. In particular, the first derivative of the wavefront phase profile and the local radius of curvature of the wavefront are related to the position and inclination of the observed moiré fringes.
Original language | English |
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Article number | 20 |
Pages (from-to) | 140-144 |
Number of pages | 5 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 5533 |
DOIs | |
State | Published - 2004 |
Externally published | Yes |
Event | Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II - Denver, CO, United States Duration: 5 Aug 2004 → 5 Aug 2004 |
Keywords
- Mirror metrology
- Moiré interferometry
- Synchrotron radiation
- X-ray interferometry
- X-ray optics