Modeling of MEMS capacitive switches by TLM

Larissa Vietzorreck; Fabio Coccetti; Vitali Chtchekatourov; Peter Russer

Modeling of MEMS capacitive switches by TLM

Larissa Vietzorreck
, Fabio Coccetti
, Vitali Chtchekatourov
, Peter Russer

Technical University of Munich

Technical University of Munich

Research output: Contribution to journal › Conference article › peer-review

9 Scopus citations

Abstract

The high-frequency behaviour of a microelectromechanical capacitive switch is investigated using TLM. A post-processing of the time-domain signal is presented which avoids long calculation times. The calculated results of a metal membrane switch show very good agreement to results obtained by other numerical methods and measurements.

Original language	English
Pages (from-to)	1221-1223
Number of pages	3
Journal	IEEE MTT-S International Microwave Symposium Digest
Volume	2
State	Published - 2000
Event	Proceedings of the 1999 IEEE MTT-S International Microwave Symposium - Boson, MA, USA Duration: 11 Jun 2000 → 16 Jun 2000

Cite this

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title = "Modeling of MEMS capacitive switches by TLM",

abstract = "The high-frequency behaviour of a microelectromechanical capacitive switch is investigated using TLM. A post-processing of the time-domain signal is presented which avoids long calculation times. The calculated results of a metal membrane switch show very good agreement to results obtained by other numerical methods and measurements.",

author = "Larissa Vietzorreck and Fabio Coccetti and Vitali Chtchekatourov and Peter Russer",

year = "2000",

language = "English",

volume = "2",

pages = "1221--1223",

journal = "IEEE MTT-S International Microwave Symposium Digest",

issn = "0149-645X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "Proceedings of the 1999 IEEE MTT-S International Microwave Symposium ; Conference date: 11-06-2000 Through 16-06-2000",

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TY - JOUR

T1 - Modeling of MEMS capacitive switches by TLM

AU - Vietzorreck, Larissa

AU - Coccetti, Fabio

AU - Chtchekatourov, Vitali

AU - Russer, Peter

PY - 2000

Y1 - 2000

N2 - The high-frequency behaviour of a microelectromechanical capacitive switch is investigated using TLM. A post-processing of the time-domain signal is presented which avoids long calculation times. The calculated results of a metal membrane switch show very good agreement to results obtained by other numerical methods and measurements.

AB - The high-frequency behaviour of a microelectromechanical capacitive switch is investigated using TLM. A post-processing of the time-domain signal is presented which avoids long calculation times. The calculated results of a metal membrane switch show very good agreement to results obtained by other numerical methods and measurements.

UR - https://www.scopus.com/pages/publications/0033678495

M3 - Conference article

AN - SCOPUS:0033678495

SN - 0149-645X

VL - 2

SP - 1221

EP - 1223

JO - IEEE MTT-S International Microwave Symposium Digest

JF - IEEE MTT-S International Microwave Symposium Digest

T2 - Proceedings of the 1999 IEEE MTT-S International Microwave Symposium

Y2 - 11 June 2000 through 16 June 2000

ER -

Modeling of MEMS capacitive switches by TLM

Abstract

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