TY - GEN
T1 - Modeling of an out-of-plane capacitive MEMS transducer with dynamically coupled electrodes
AU - Bosetti, Gabriele
AU - Manz, Johannes
AU - Schrag, Gabriele
AU - Dehe, Alfons
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/7/18
Y1 - 2017/7/18
N2 - This paper presents a system-level, physic-based compact model of a novel out-of-plane capacitive MEMS transducer based on a combination of plate- A nd comb-capacitor drives. Unlike conventional plate-capacitor-like transducers both electrodes of this novel device are movable. This feature results in a device dynamics analogous to a weakly coupled two-degree-of-freedom oscillator system. An analysis of the governing electro-mechanical and fluid-mechanical coupling effects is presented together with an analytical description of the dynamics of the coupled electrodes. The proposed model can be simulated with the help of standard circuit simulation software enabling both transient and small signal analysis. Dynamic measurements performed on prototype devices in a low-pressure environment are used to calibrate and validate the model. Sensitivity enhancement and resonance frequency shift due to electrostatic spring softening are self-consistently included in the model since the interaction among mechanical, electrical, and fluidic domain is implemented on a physical basis. The presented study provides accurate physical understanding of the device, which can be employed to analyze and improve the transducer characteristics. The energy-coupled and modular modeling approach enables the extension of the model to investigate the performance of the device under the impact of the surrounding atmosphere and the effects of device packaging.
AB - This paper presents a system-level, physic-based compact model of a novel out-of-plane capacitive MEMS transducer based on a combination of plate- A nd comb-capacitor drives. Unlike conventional plate-capacitor-like transducers both electrodes of this novel device are movable. This feature results in a device dynamics analogous to a weakly coupled two-degree-of-freedom oscillator system. An analysis of the governing electro-mechanical and fluid-mechanical coupling effects is presented together with an analytical description of the dynamics of the coupled electrodes. The proposed model can be simulated with the help of standard circuit simulation software enabling both transient and small signal analysis. Dynamic measurements performed on prototype devices in a low-pressure environment are used to calibrate and validate the model. Sensitivity enhancement and resonance frequency shift due to electrostatic spring softening are self-consistently included in the model since the interaction among mechanical, electrical, and fluidic domain is implemented on a physical basis. The presented study provides accurate physical understanding of the device, which can be employed to analyze and improve the transducer characteristics. The energy-coupled and modular modeling approach enables the extension of the model to investigate the performance of the device under the impact of the surrounding atmosphere and the effects of device packaging.
UR - http://www.scopus.com/inward/record.url?scp=85027862177&partnerID=8YFLogxK
U2 - 10.1109/DTIP.2017.7984459
DO - 10.1109/DTIP.2017.7984459
M3 - Conference contribution
AN - SCOPUS:85027862177
T3 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017
BT - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017
A2 - Charlot, Benoit
A2 - Nouet, Pascal
A2 - Pellet, Claude
A2 - Mita, Yoshio
A2 - Pressecq, Francis
A2 - Schneider, Peter
A2 - Smith, Stewart
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 19th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017
Y2 - 29 May 2017 through 1 June 2017
ER -