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Modeling nonlinear behavior of RF Bulk Acoustic Wave resonators

  • V. Chauhan
  • , A. Tag
  • , M. Mayer
  • , M. Pitschi
  • , R. Weigel
  • , A. Hagelauer
  • Friedrich-Alexander Universitat Erlangen-Nurnberg (FAU)
  • TDK-EPC Corporation

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

11 Scopus citations

Abstract

In this work, the Poly-Harmonic Distortion (PHD) model has been used to characterize the nonlinearities of Bulk Acoustic Wave (BAW) solidly mounted resonators (SMR). The new approach of using X-parameters for characterization and simulation of nonlinearities is described. The amplitude and phase of the fundamental mode and its harmonics up to third order have been measured and simulated by using the X-parameter framework. The simulation and measurement results for phase and amplitude of X-parameters describing the relations between incident and reflected harmonics of the same as well as different orders are shown. The X-parameter measurements of BAW components up to third order harmonics have been carried out with a nonlinear vector network analyzer (NVNA). These measurements under large-signal operating conditions were used to determine the nonlinear material constants responsible for the nonlinearity in BAW resonators.

Original languageEnglish
Title of host publication2016 IEEE International Ultrasonics Symposium, IUS 2016
PublisherIEEE Computer Society
ISBN (Electronic)9781467398978
DOIs
StatePublished - 1 Nov 2016
Externally publishedYes
Event2016 IEEE International Ultrasonics Symposium, IUS 2016 - Tours, France
Duration: 18 Sep 201621 Sep 2016

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2016-November
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2016 IEEE International Ultrasonics Symposium, IUS 2016
Country/TerritoryFrance
CityTours
Period18/09/1621/09/16

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