TY - GEN
T1 - Modeling, fabrication and characterization of a high-performance micropump
AU - Herz, M.
AU - Horsch, D.
AU - Storch, R.
AU - Wackerle, M.
AU - Lueth, T.
AU - Richter, M.
PY - 2010
Y1 - 2010
N2 - In this paper, the design and fabrication of a multi-material high-performance micropump is presented. Exceptional flow rates of 90 ml/min were achieved by appropriate design optimization. Manufacturing steps such as laser welding and hot embossing were successfully realized and provide a robust and scalable production technique for the micropump. Characterization of the pump demonstrated high repeatability of the air flow rate as well as long life. Analytical modeling successfully predicts the behaviour of the pump with regard to inertial effects.
AB - In this paper, the design and fabrication of a multi-material high-performance micropump is presented. Exceptional flow rates of 90 ml/min were achieved by appropriate design optimization. Manufacturing steps such as laser welding and hot embossing were successfully realized and provide a robust and scalable production technique for the micropump. Characterization of the pump demonstrated high repeatability of the air flow rate as well as long life. Analytical modeling successfully predicts the behaviour of the pump with regard to inertial effects.
UR - http://www.scopus.com/inward/record.url?scp=77952778065&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2010.5442398
DO - 10.1109/MEMSYS.2010.5442398
M3 - Conference contribution
AN - SCOPUS:77952778065
SN - 9781424457649
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 1083
EP - 1086
BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Y2 - 24 January 2010 through 28 January 2010
ER -