TY - GEN
T1 - Modeling and Manufacturing of an Electrostatically Driven Actuator for Micropumps
AU - Leistner, H.
AU - Anheuer, D.
AU - Bosetti, G.
AU - Schrag, G.
AU - Richter, M.
N1 - Publisher Copyright:
© VDE VERLAG GMBH · Berlin · Offenbach
PY - 2021
Y1 - 2021
N2 - This work constitutes towards a bubble tolerant electrostatic micropump. One key task in this respect is the development of the actuator unit. Specifically, a model is derived utilizing an analytical compact model and comparing it to a numerical continuous-field and a system-level approach, whereby the model allows the estimation of operating voltages, stroke volumes and blocking-pressures of a perspective micropump. Finally, the manufacturing as well as an initial characterization of the actuator unit is presented, enabling the realization of an electrostatically driven micropump.
AB - This work constitutes towards a bubble tolerant electrostatic micropump. One key task in this respect is the development of the actuator unit. Specifically, a model is derived utilizing an analytical compact model and comparing it to a numerical continuous-field and a system-level approach, whereby the model allows the estimation of operating voltages, stroke volumes and blocking-pressures of a perspective micropump. Finally, the manufacturing as well as an initial characterization of the actuator unit is presented, enabling the realization of an electrostatically driven micropump.
UR - http://www.scopus.com/inward/record.url?scp=85125195410&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85125195410
T3 - MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings
SP - 396
EP - 399
BT - MikroSystemTechnik Kongress 2021
PB - VDE VERLAG GMBH
T2 - MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte - MikroSystemTechnik Congress 2021: Microelectronics, Microsystems Engineering and their Applications - Innovative Products for Future-Oriented Markets
Y2 - 8 November 2021 through 10 November 2021
ER -