Modeling and Manufacturing of an Electrostatically Driven Actuator for Micropumps

H. Leistner, D. Anheuer, G. Bosetti, G. Schrag, M. Richter

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

This work constitutes towards a bubble tolerant electrostatic micropump. One key task in this respect is the development of the actuator unit. Specifically, a model is derived utilizing an analytical compact model and comparing it to a numerical continuous-field and a system-level approach, whereby the model allows the estimation of operating voltages, stroke volumes and blocking-pressures of a perspective micropump. Finally, the manufacturing as well as an initial characterization of the actuator unit is presented, enabling the realization of an electrostatically driven micropump.

Original languageEnglish
Title of host publicationMikroSystemTechnik Kongress 2021
Subtitle of host publicationMikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings
PublisherVDE VERLAG GMBH
Pages396-399
Number of pages4
ISBN (Electronic)9783800756575
StatePublished - 2021
EventMikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte - MikroSystemTechnik Congress 2021: Microelectronics, Microsystems Engineering and their Applications - Innovative Products for Future-Oriented Markets - Stuttgart-Ludwigsburg, Germany
Duration: 8 Nov 202110 Nov 2021

Publication series

NameMikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings

Conference

ConferenceMikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte - MikroSystemTechnik Congress 2021: Microelectronics, Microsystems Engineering and their Applications - Innovative Products for Future-Oriented Markets
Country/TerritoryGermany
CityStuttgart-Ludwigsburg
Period8/11/2110/11/21

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