Mixed-level approach for the modeling of distributed effects in microsystems

This chapter explains a workflow for the generation of mixed-level models using squeeze film damping (SQFD) in microelectromechanical systems (MEMS). The resulting mixed-level model is benchmarked with respect to FEM simulations, experimental data, and alternative modeling approaches. These approaches can be classified into four types: analytical approach based on a modified Reynolds equation, analytical approach based on decomposition into cells, mixed-mode approach based on FEM, and mixed-level approach based on GKN theory. The key factors for enabling the routine and successful use of the mixed-level approach at a company or an institute are the availability of models for the problem of interest, that is, a respective library of calibrated models, and an easy-to-use software tool for automatic model generation.