Mixed hydrazido amido/imido complexes of tantalum, hafnium and zirconium: Potential precursors for metal nitride MOCVD

Arne Baunemann, Younsoo Kim, Manuela Winter, Roland A. Fischer

Research output: Contribution to journalArticlepeer-review

24 Scopus citations

Abstract

The coordination chemistry of the hydrazine derivatives dimethylhydrazine (Hdmh) and N-trimethylsilyl-N′N′-dimethylhydrazine (Htdmh) at Ta, Zr and Hf was investigated aiming at volatile mixed ligand all-nitrogen coordinated compounds. The hydrazido ligands were introduced either by salt metathesis employing the Li salts of the hydrazines and the tetrachlorides MCl4 (M = Zr, Hf) or by amine substitution using M(NR 2)4 (R = Me, Et) and [(t-BuN)Ta(NR2) 3]. The new complexes were fully characterised including 1H/13C NMR, mass spectrometry and a study of their thermal behaviour. The crystal structures of [ZrCl(tdmh)3] and the all-nitrogen coordinated complex [Ta(N-t-Bu)(NMe2)2(tdmh)] are discussed as well as the structure of the by-product [Li(tdmh)(py)] 2. Preliminary MOCVD experiments of the liquid compound [Ta(NEt 2)2(N-t-Bu)(tdmh)] were performed and the deposited TaN(Si) films were analysed by RBS and SEM.

Original languageEnglish
Pages (from-to)121-128
Number of pages8
JournalDalton Transactions
Issue number1
DOIs
StatePublished - 2006
Externally publishedYes

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