Mit Röntgenlithographie gefertigte Gitterstrukturen ermöglichen neue Röntgenbildgebung in Medizin und Materialwissenschaft

Translated title of the contribution: Grating structures manufactured with X-ray lithography enable new type of X-ray imaging in medicine and materials science

Frieder Koch, Tobias Schröter, Jan Meiser, Pascal Meyer, Danays Kunka, Abrar Faisal, Andre Yaroshenko, Lorenz Birnbacher, Friedrich Prade, Franz Pfeiffer, Thomas Duttenhofer, Joachim Schulz, Jürgen Mohr

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

All widespread X-ray imaging techniques generate image contrast from the variation in absorption of different materials, which limits the achievable contrast especially for light elements and materials with similar absorption behaviour. A Talbot-Lau interferometer provides the possibility to measure, in addition to the conventional absorption image, the phase shift and a dark field image. These images provide additional information of the sample, establishing entirely new diagnostic possibilities in both medical and materials science. The technique uses periodical grating structures which have to fulfil rigid requirements. On the one hand the period has to be in the range of a few micrometres to enable a compact setup, on the other hand the grating lamellae have to be high enough to absorb the incoming X-rays. This leads to an extreme aspect ratio, which can be reached with X-ray lithography. We present the recent advances in this technique, split into three main work packages: the structures' quality and aspect ratio, the enlargement of the structure area and the reduction of unwanted absorption in the substrate. We further show how these advancements are applied in medical diagnostics and material analysis.

Translated title of the contributionGrating structures manufactured with X-ray lithography enable new type of X-ray imaging in medicine and materials science
Original languageGerman
Title of host publicationMikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings
PublisherVDE VERLAG GMBH
Pages282-285
Number of pages4
ISBN (Electronic)9783800741007
StatePublished - 2015
EventMikroSystemTechnik Kongress 2015: MEMS, Mikroelektronik, Systeme - MikroSystemTechnik Conference 2015: MEMS, Microelectronics, Systems - Karlsruhe, Germany
Duration: 26 Oct 201528 Oct 2015

Publication series

NameMikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings

Conference

ConferenceMikroSystemTechnik Kongress 2015: MEMS, Mikroelektronik, Systeme - MikroSystemTechnik Conference 2015: MEMS, Microelectronics, Systems
Country/TerritoryGermany
CityKarlsruhe
Period26/10/1528/10/15

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