Miniaturized thermoelectric generators based on poly-Si and poly-SiGe surface micromachining

M. Strasser, R. Aigner, M. Franosch, G. Wachutka

Research output: Contribution to journalConference articlepeer-review

190 Scopus citations

Abstract

We report on miniaturized thermoelectric generators (TEGs) which are being developed to convert waste heat into a few microwatts of electrical power, sufficient to supply microelectronic circuitry. A BiCMOS realization using standard materials is favored to make these generators amenable to low cost applications. In order to optimize our device, the design and the material properties have been studied. The use of micromachining techniques allowed us to improve the thermal efficiency of the generator significantly. Low thermal conductivity of the thermoelectric materials proved to be the most important factor to increase the output power. The materials we have investigated are poly-Si and poly-SiGe. Experimental results obtained from fabricated devices show good agreement with the predictions of thermal simulations.

Original languageEnglish
Pages (from-to)535-542
Number of pages8
JournalSensors and Actuators, A: Physical
Volume97-98
DOIs
StatePublished - 1 Apr 2002
EventTransducers'01 Eurosensors XV - Munich, Germany
Duration: 10 Jun 200114 Jun 2001

Keywords

  • Figure of merit
  • Poly-Si
  • Poly-SiGe
  • Surface micromachining
  • Thermal conductivity
  • Thermoelectric generator

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