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Microreactors Constructed from Insulating Materials and Semiconductors

  • LS TEP FG Mikrostrukturierte mechatronische SystemeTU Miinchen
  • Mikroglas Chemtech GmbH

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

Original languageEnglish
Title of host publicationMicrochemical Engineering in Practice
PublisherJohn Wiley and Sons
Pages47-64
Number of pages18
ISBN (Print)9780470239568
DOIs
StatePublished - 16 Aug 2010
Externally publishedYes

Keywords

  • Chemical process technology
  • Doped semiconductor
  • Glass microreactors
  • Micro-electro-mechanical-systems
  • Silicon

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