Micromechanical sensor for studying heats of surface reactions, adsorption, and cluster deposition processes

Keyphrases

• Surface Reaction 100%
• Deposition Process 100%
• Cantilever 100%
• Surface Clusters 100%
• Surface Adsorption 100%
• Micromechanical Sensors 100%
• Cluster Deposition 100%
• Response Time 40%
• Micromachining 20%
• High Sensitivity 20%
• Highly Sensitive 20%
• Model Catalyst 20%
• Hydrogenation Reaction 20%
• Metal Film 20%
• Supported Clusters 20%
• Thin Metal Films 20%
• Minimum Power 20%
• Cluster Model 20%
• Heat Exchange 20%
• Coefficient of Thermal Expansion 20%
• Soft Landing 20%
• Palladium Clusters 20%
• Thermodynamic Study 20%
• Cantilever Array 20%
• Film Materials 20%
• Silicon Cantilever 20%
• Thermal Bending 20%
• Thermally Sensitive 20%
• Submillisecond Response 20%
• 1,3-Butadiene Hydrogenation 20%
• Femtojoule 20%
• Limit of Detection 20%

Material Science

• Silicon 100%
• Metal Film 100%
• Surface Reaction 100%
• Film 50%
• Hydrogenation 50%
• Aluminum 50%
• Palladium 50%
• Thermal Expansion 50%
• Surface (Surface Science) 50%

Engineering

• Deposition Process 100%
• Response Time 100%
• Illustrates 50%
• Heat Exchange 50%
• Coefficient of Expansion 50%
• Film Material 50%
• Hydrogenation 50%